| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryopanel in which a suction panel has an excellent suction performance, a cryopump having the cryopanel, a method of manufacturing a cryopanel for easily forming an adhesive layer with uniform film thickness, and a method of manufacturing the cryopump having the cryopanel. SOLUTION: The method of manufacturing the cryopanel comprises the steps of: forming projections 33 facing each other and extending on a sheet metal 32; coating the surface of the sheet metal 32 between the projections 33 with an adhesive agent 18a; and flattening the adhesive agent 18 by using a squeezee 36. In the flattening step of the adhesive layer 18, the flat surface of the squeezee 36 is made to abut on the upper surfaces of two projections 33 facing each other and to move so that the adhesive agent 18a is spread. Since the gap of the squeeze 36 from the sheet metal 32 is restricted by the upper surface of the projections 33, the adhesive agent layer 18 with uniform film thickness is formed. COPYRIGHT: (C)2008,JPO&INPIT
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