发明名称 |
Wafer-to-wafer control using virtual modules |
摘要 |
The invention relates to controlling a semiconductor processing system. Among other things, the invention relates to a run-to-run controller to create virtual modules to control a multi-pass process performed by a multi-chamber tool during the processing of a semiconductor wafer.
|
申请公布号 |
US7212878(B2) |
申请公布日期 |
2007.05.01 |
申请号 |
US20040927500 |
申请日期 |
2004.08.27 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FUNK MERRITT;NATZLE WESLEY |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|