Probe needle for testing semiconductor chips and method for producing said probe needle

摘要

A probe needle for testing semiconductor chips includes one end that is fixed in a holding element and a free end that includes a contact tip. The probe needle is provided-at least on the surface of the contact tip-with a layer consisting of a chemically inert, electroconductive material which is hard in relation to the material of contact surfaces of the semiconductor chips. For example, the layer can be titanium nitride.