| 发明名称 |
Methods and systems for handling a workpiece in vacuum-based material handling system |
| 摘要 |
Methods and systems are provided for handling an item in a vacuum-based handling system for semiconductor manufacturing. The methods include providing a heater or dryer for the load lock of the handling system that dries a semiconductor wafer during the pumping down of the load lock.
|
| 申请公布号 |
US7210246(B2) |
申请公布日期 |
2007.05.01 |
| 申请号 |
US20040985727 |
申请日期 |
2004.11.10 |
| 申请人 |
BLUESHIFT TECHNOLOGIES, INC. |
发明人 |
VAN DER MEULEN PETER |
| 分类号 |
F26B5/04;B25J17/00;B65G1/00;B66C1/00;F26B13/30;G06F7/00;G06F19/00;H01L;H01L21/00;H01L21/677 |
主分类号 |
F26B5/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
