TREATMENT METHOD OF SURFACE OF GAS PIPE FOR SUPPLYING FLUORINE GAS

摘要

A method for treating the surface of a pipe for supplying fluorine gas is provided to reduce time for treating and improve productivity by using gas laser and fluorine gas as a crude material of fluorine gas. A method for treating the surface of a pipe for supplying fluorine comprises a first step(S202) of flowing non-active gas inside the pipe at the pressure of 1 to 30 torr; a second step(S204) of maintaining closing of a third valve after vacuuming of the pipe for supplying fluorine; a third step(S206) of maintaining fluorine gas inside the pipe for supplying fluorine at the pressure of 60 to 80 torr for 30 minutes; a fourth step of exhausting the filled fluorine gas by opening the third valve; a fifth step(S212) of maintaining the fluorine gas filled inside the pipe for supplying fluorine at the pressure of 1 to 2 torr for 30 minutes; a sixth step(S214) of maintaining the fluorine gas filled inside the pipe for supplying fluorine to be at the pressure of 2 to 10 torr for 30 minutes; a step(S216) of closing a third valve connected to a vacuum tank after vacuuming inside the pipe by operating a vacuum pump; and a seventh step(S218) of filling the fluorine gas inside the pipe at the pressure of 1 to 30 torr by opening the cylinder wherein the fluorine gas is filled.