发明名称 Circuit board integrated optical coupling elements
摘要 Techniques for circuit board processing are provided. In one aspect, a method of processing a circuit board having one or more optical waveguides associated therewith is provided. The method comprises the following steps. One or more etch stop layers in proximity to the one or more waveguides are provided, at least one of the etch stop layers comprising one or more fiducials therein. From a surface of the circuit board, the one or more etch stop layers are used to selectively remove material to provide openings having a defined positioning and depth in the circuit board. A circuit board having one or more optical waveguides associated therewith is also provided.
申请公布号 US7212698(B2) 申请公布日期 2007.05.01
申请号 US20040775854 申请日期 2004.02.10
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BAPST URS;BERGER CHRISTOPH;BUDD RUSSELL ALAN;HORST FOLKERT;OFFREIN BERT JAN
分类号 G02B6/12;G02B6/10;G02B6/26;G02B6/42;G02B6/43;H01L21/00;H05K1/02;H05K3/00 主分类号 G02B6/12
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