TRANSFER CHAMBER HAVING TRANSPARENT LID,申请号KR20050100964-传众专利搜索

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发明名称	TRANSFER CHAMBER HAVING TRANSPARENT LID
摘要
申请公布号	KR20070044725(A)	申请公布日期	2007.04.30
申请号	KR20050100964	申请日期	2005.10.25
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	PARK, SUNG WAN
分类号	H01L21/203	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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