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发明名称
COMPOSITION OF SLURRY FOR POLISHING SILICON WAFER AND METHOD OF POLISHING USING THEREBY
摘要
申请公布号
KR100715184(B1)
申请公布日期
2007.04.30
申请号
KR20050135910
申请日期
2005.12.30
申请人
CHEIL INDUSTRIES INC.
发明人
ROH, HYUN SOO;LEE, TAE YOUNG;PARK, TAE WON;LEE, IN KYUNG
分类号
C09K3/14
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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