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发明名称
METHOD OF MANUFACTURING AN AMORPHOUS CARBON FILM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
摘要
申请公布号
KR100715530(B1)
申请公布日期
2007.04.30
申请号
KR20050107947
申请日期
2005.11.11
申请人
TES CO., LTD.
发明人
PARK, KEUN OH
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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