ELECTROSTATIC CHUCK TYPE HEATER, METHOD OF MANUFACTURING THE SAME AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE HAVING THE SAME,申请号KR20050100272-传众专利搜索

发明名称	ELECTROSTATIC CHUCK TYPE HEATER, METHOD OF MANUFACTURING THE SAME AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE HAVING THE SAME
摘要
申请公布号	KR20070044222(A)	申请公布日期	2007.04.27
申请号	KR20050100272	申请日期	2005.10.24
申请人	KOMICO LTD.	发明人	PARK, JUN SIK;YUN, SOO WON
分类号	H01L21/324	主分类号	H01L21/324
代理机构		代理人
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