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发明名称
METHOD AND APPARATUS FOR EPITAXIALLY GROWING A MATERIAL ON A SUBSTRATE
摘要
申请公布号
KR100712241(B1)
申请公布日期
2007.04.27
申请号
KR20017014328
申请日期
2001.11.09
申请人
发明人
分类号
C30B25/02
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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