申请人 |
INSTITUT PROBLEM TEKHNOLOGII MIKROEHLEKTRONIKI I OSOBOCHISTYKH MATERIALOV ROSSIJSKOJ AKADEMII NAUK (IPTM RAN) |
发明人 |
ARISTOV VITALIJ VASIL'EVICH;ANDREEVA ALEVTINA VIKTOROVNA;DESPOTULI ALEKSANDR LEONIDOVICH;LEVASHOV VLADIMIR IVANOVICH;MAL'TSEV PETR PAVLOVICH;STARKOV VITALIJ VASIL'EVICH;SHABEL'NIKOV LEONID GRIGOR'EVICH |