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发明名称
APPARATUS FOR CONVEYING SUBSTRATE, METHOD FOR CONVEYING SUBSTRATE AND SUBSTRATE CONVEYANCE SYSTEM USING THE SAME
摘要
申请公布号
KR20070044313(A)
申请公布日期
2007.04.27
申请号
KR20050100444
申请日期
2005.10.24
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOI, HO GEUN;CHOI, JIN CHEL;KANG, SEUNG BAE
分类号
H01L21/68;B65G1/04
主分类号
H01L21/68
代理机构
代理人
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