发明名称 A MATERIAL COMPOSITION FOR NANO-AND MICRO-LITHOGRAPHY
摘要 <p>A material composition, which is used as a liquid resist, includes a first component comprising a monomer portion and at least one cationically polymerizable functional group, and a crosslinker reactive with the first component and comprising at least three cationically polymerizable functional groups. The material composition also includes a cationic photoinitiator. Upon exposure to UV light, the material composition crosslinks via cure to form a cured resist film that is the reaction product of the first component, the crosslinker, and the cationic photoinitiator. An article includes a substrate layer and a resist layer formed on the substrate layer from the material composition.</p>
申请公布号 KR20070044392(A) 申请公布日期 2007.04.27
申请号 KR20067020602 申请日期 2006.10.02
申请人 DOW CORNING CORPORATION;THE REGENTS OF THE UNIVERSITY OF MICHIGAN 发明人 FU PENG FEI;GUO LINGJIE JAY;CHENG XING
分类号 G03F7/004;G03F7/028 主分类号 G03F7/004
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