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发明名称
МНОГОФУНКЦИОНАЛЬНАЯ КАМЕРА ДЛЯ ИЗМЕРЕНИЯ И ЗАДАНИЯ РАЗЛИЧНЫХ ПАРАМЕТРОВ ОДИНОЧНЫХ И МАТРИЧНЫХ СТРУКТУР
摘要
申请公布号
RU2005132028(A)
申请公布日期
2007.04.27
申请号
RU20050132028
申请日期
2005.10.18
申请人
Зеленов Григорий Яковлевич (RU)
发明人
Зеленов Григорий Яковлевич (RU)
分类号
H01L31/00
主分类号
H01L31/00
代理机构
代理人
主权项
地址
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