| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnet set which can easily change the configuration of a cathode magnet in a magnetron sputtering method. SOLUTION: The magnet set is used for a cathode magnet 142 in a magnetron sputtering apparatus, and comprises a plurality of magnet rings 1421a which form a nested structure, are fit each in another ring and can be used as the cathode magnet 142. COPYRIGHT: (C)2008,JPO&INPIT
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