| 摘要 |
PROBLEM TO BE SOLVED: To provide a quartz glass crucible which gives a silicon single crystal hardly having pinholes. SOLUTION: The quartz glass crucible is used for pulling a silicon single crystal, wherein the area of a crystalline silica which is crystallized from an amorphous silica is suppressed to 10% or less of the interior area of the crucible and the density of the recessed parts formed by open bubbles on the interior surface of the crucible is 0.01-0.2 piece/mm<SP>2</SP>. The method of preventing pinholes comprises using the quartz glass crucible and suppressing the erosion rate of the interior surface of the crucible to 20μm/hr or less to pull a single crystal. COPYRIGHT: (C)2008,JPO&INPIT
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