发明名称 CMOS image sensor and manufacturing method thereof
摘要 A CMOS image sensor and a method for manufacturing the same are provided. The CMOS image sensor includes: a photo diode formed in a semiconductor substrate for generating an optical signal from incident light; a first micro lens formed on the semiconductor substrate above the photo diode; a plurality of inter-layer dielectrics and metal wires formed on the semiconductor substrate having the first micro lens; a planarization layer formed above the plurality of inter-layer dielectrics metal wires; and a second micro lens formed on the planarization layer. In one embodiment, the second micro lens incorporates a fly-eye pattern.
申请公布号 US2007090419(A1) 申请公布日期 2007.04.26
申请号 US20060585539 申请日期 2006.10.24
申请人 LEE JUN S 发明人 LEE JUN S.
分类号 H01L31/113;H01L21/8242;H01L31/06;H01L31/062 主分类号 H01L31/113
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