COATING METHOD AND COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a coating method and a coating apparatus capable of stably coating a lower layer with an upper layer even under a condition of a wide lip clearance when subsequently starting to coat the lower layer with the upper layer to be coated, and preventing loss of coating solution and substrate. SOLUTION: The coating method comprises sequentially performing: a coating preparation step for stopping a solution supply pump 68 in a state that second coating means 28 is filled with the upper layer coating solution from a coating solution supply line 53 to a lip end 48 at an evacuation position B evacuated from a coating position A; a moving step for moving a coating head 42 to the coating position A; and a coating start step for starting to apply the upper layer coating solution by operating the solution supply pump 68 during a period ranging before and within 3 minutes after a front end in a running direction of a lower layer substrate reaches the coating position A. COPYRIGHT: (C)2007,JPO&INPIT