| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation device for gas which produces a high concentration of ultraviolet-irradiated gas such as ozone and radical oxygen, and to provide a dry surface treatment device using the ultraviolet irradiation device. SOLUTION: The ultraviolet irradiation device 1 for gas comprises: a lamp house 2; a supply part 5 which supplies gas from the upper side; a plurality of UV lamps 4 which irradiate supplied gas with ultraviolet rays; and a discharge part 6 which discharges ultraviolet-irradiated gas from the lower side, wherein a plurality of ultraviolet radiation parts 3 are arranged in parallel with an interval with each other substantially uniformly over the whole in the lamp house so that the former and later parts are located vertically on different steps and, as seen from above, have no clearance, and intervals between wall surfaces 8 of the former and later parts and the ultraviolet radiation part 3 are within an effective irradiation distance capable of deteriorating passing gas with the UV lamps 4. The dry surface treatment device treats a body 11 to be treated by allowing a high concentration of radical oxygen (O) which is produced and discharged by using the ultraviolet irradiation device 1 for gas to contact with the body 11 to be treated. According to the ultraviolet irradiation device for gas, radical oxygen (O) is produced and discharged by supplying oxygen (O<SB>2</SB>) or ozone (O<SB>3</SB>) and applying ultraviolet rays of 185 nm and 254 nm and, by using the radical oxygen (O), high definition surface treatment is permitted. COPYRIGHT: (C)2007,JPO&INPIT
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