发明名称 BUMP FORMING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a fine bump forming method indispensable to high density packaging, especially a bump forming method which is cheap as compared with cases based on a photolithographic technique and a plating technique, and is less subject to an environmental side since many chemicals and water are not used. <P>SOLUTION: The bump forming method comprises the steps of forming conductive resin layers covering a substrate and an electrode front surface on the substrate; removing the conductive resin layer on the substrate by a laser, while leaving the conductive resin layer on the electrode front surface on the substrate; and forming a bump consisting of conductive resin. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007110050(A) 申请公布日期 2007.04.26
申请号 JP20050302144 申请日期 2005.10.17
申请人 NAMICS CORP;SUGA TADATOMO;TSUKAMOTO KATSUHIDE 发明人 SUGA TADATOMO;TSUKAMOTO KATSUHIDE;YOSHII AKITO;KITAMURA MASAHIRO;YAMAGUCHI HIROSHI
分类号 H01L21/60 主分类号 H01L21/60
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