| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mask and its inspection method capable of performing destructive inspection without preparing an inspection mask and capable of more accurately performing non-destructive inspection. <P>SOLUTION: A mask comprises a membrane 2 for exposure which has transmission portions of exposure beams and non-transmission portions at a prescribed pattern, a thick film part 3 formed around the membrane 2 for exposure and capable of supporting the membrane 2 for exposure and a membrane 4 for inspection which has transmission portions and non-transmission portions, has an area larger than that of the membrane 2 for exposure, has distortion larger than that of the membrane 2 for exposure, and formed on a part of the thick film part 3 so as to be separated from the membrane 2 for exposure. Inspection is performed by using the membrane 4 for inspection. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
