| 摘要 |
PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor for improving sensitivity by reducing the surface area of the inside of a sensor chamber and minimizing the influence of out gas, to provide electronic equipment, and to provide a manufacturing method of the dynamic quantity sensor. SOLUTION: The dynamic quantity sensor 2 comprises a pair of glass substrates 20, and a silicon substrate 21 joined by anode bonding while being sandwiched between the pair of glass substrates 20. A detection section 25 for detecting dynamic quantity is formed by the silicon substrate 21. Further, the dynamic quantity sensor 2 comprises a frame 27 that is formed by the silicon substrate 21, airtightly blocks the area between the pair of glass substrates 20, and forms a sensor chamber 26 for storing the detection section 25; at least one conductive post 28 that is formed by the silicon substrate 21 outside the sensor chamber 26 and comes into contact with the pair of glass substrates 20; and first wiring 38, a metal film 37, and second wiring 39 for connecting the detection section 25 and the post 28 electrically. COPYRIGHT: (C)2007,JPO&INPIT
|
