| 摘要 |
The invention provides a microinjection apparatus for a fluid. The microinjection apparatus comprises a substrate, a manifold, at least one fluid chamber, and at least one thermal sensing film. The manifold is formed on the substrate for containing the fluid therein. The at least one fluid chamber is also formed on the substrate and in communication with the manifold. Furthermore, the fluid chamber has a respective orifice and a respective heater disposed adjacent to the orifice. In addition, the thermal sensing film corresponds to the fluid chamber and is formed on a surface adjacent to the orifice. It should be noticed that the thermal sensing film has a respective color changeable in response to a heat generated during operation of the corresponding heater.
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