发明名称 MOS TRANSISTOR WITH RECESSED GATE AND METHOD OF FABRICATING THE SAME
摘要 A MOS transistor with a recessed gate and a method of fabricating the same: The MOS transistor comprises a semiconductor substrate, and a trench isolation layer located in a predetermined region of the semiconductor substrate for defining an active region. The trench isolation layer has a negative slope on at least a lower sidewall thereof. A recessed gate is located in a predetermined region of the active region, and a bottom surface of the recessed gate is placed adjacent the negatively slopped sidewall of the trench isolation layer.
申请公布号 US2007093021(A1) 申请公布日期 2007.04.26
申请号 US20060562138 申请日期 2006.11.21
申请人 发明人 PARK JONG-CHUL;SONG JONG-HEUI
分类号 H01L21/8242;H01L21/8238 主分类号 H01L21/8242
代理机构 代理人
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