发明名称 Technique For Preparing Precursor Films And Compound Layers For Thin Film Solar Cell Fabrication And Apparatus Corresponding Thereto
摘要 The present invention advantageously provides for, in different embodiments, improved contact layers or nucleation layers over which precursors and Group IBIIIAVIA compound thin films adhere well and form high quality layers with excellent micro-scale compositional uniformity. It also provides methods to form precursor stack layers, by wet deposition techniques such as electroplating, with large degree of freedom in terms of deposition sequence of different layers forming the stack.
申请公布号 US2007093006(A1) 申请公布日期 2007.04.26
申请号 US20060462685 申请日期 2006.08.04
申请人 BASOL BULENT M 发明人 BASOL BULENT M.
分类号 H01L21/84;H01L21/00;H01L29/08;H01L35/24;H01L51/00 主分类号 H01L21/84
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