Elastomeric e.g. silicone encapsulation for optical connected to support - has two thin beam pairs for connection, with beams in each pair symmetric w.r.t. each other, and with two differing response characteristic strain gauges formed on each beam upper surface

摘要

The acceleration sensor includes a relatively thick weight (100) made of semiconductor, and a relatively thick support member (120) surrounding the weight, and separated by a fixed gap. Two sets of paired thin beams connect the weight outer edge with the support inner edge. member. In each of the beam sets, (111,113 and 112,114), the two beams are positioned so that one beam coincides with the other when rotated 180 degs. about the centre O of the weight, this beam coincides with the other beam. Strain gauges (131,133,135,137) are formed on the upper faces of the beams, pref. in the longitudinal direction of the respective beams; there are also strain gauges (132,134,136,138) e.g. formed in the width direction. The two sets of strain gauges have differing output characteristics in response to a force applied to the thin weight.