LIGHT IRRADIATION DEVICE,申请号KR20050052965-传众专利搜索

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发明名称	LIGHT IRRADIATION DEVICE
摘要
申请公布号	KR100859404(B1)	申请公布日期	2008.09.22
申请号	KR20050052965	申请日期	2005.06.20
申请人		发明人
分类号	H01L21/027;G03F7/20;G03F9/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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