发明名称 |
APPARATUS AND METHOD FOR MEASURING LIGHT QUANTITY |
摘要 |
PROBLEM TO BE SOLVED: To simplify an optical system and correct the sensitivity drift or linearity of a light reception element. SOLUTION: A light quantity measuring apparatus is provided with an optical chopper 2 for interrupting incident signal light at prescribed periods while rotating; a reference light source 6 for irradiating reference light different from the signal light during the period in which the signal light is interrupted by the optical chopper 2; the light reception element 5 for receiving both the signal light and the reference light and measuring the light quantity of the signal light and the light quantity of the reference light; a correction operation circuit 13 for correcting the light quantity of the signal light on the basis of the light quantity of the reference light; and a correction value computation circuit 12 for computing a correction value by comparing a prescribed reference value with a light quantity value of the prescribed light. The correction operation circuit 13 corrects the light quantity of the signal light on the basis of the correction value. COPYRIGHT: (C)2007,JPO&INPIT
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申请公布号 |
JP2007107942(A) |
申请公布日期 |
2007.04.26 |
申请号 |
JP20050297242 |
申请日期 |
2005.10.12 |
申请人 |
ADVANCED MASK INSPECTION TECHNOLOGY KK;TOPCON CORP |
发明人 |
KOBAYASHI NOBORU;OGAWA TSUTOMU;HIDESHIMA MASAYUKI;NAGAHAMA HIROYUKI;NAKAJIMA KOJI |
分类号 |
G01J1/44 |
主分类号 |
G01J1/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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