发明名称 SEMICONDUCTOR COMPONENT AND METHOD FOR PRODUCTION OF A SEMICONDUCTOR COMPONENT
摘要 A semiconductor substrate, a semiconductor chip and a semiconductor component with areas composed of a stressed monocrystalline material, and a method for production of a semiconductor component is disclosed. In one embodiment, the semiconductor chip includes relatively thick stressed layers achieving reduced switching times. For this purpose, the semiconductor substrate has one or more areas with extrinsic, permanent curvature, with the crystal structure K being compressed and/or widened and/or distorted in these areas.
申请公布号 US2007092992(A1) 申请公布日期 2007.04.26
申请号 US20060552702 申请日期 2006.10.25
申请人 INFINEON TECHNOLOGIES AG 发明人 THEUSS HORST
分类号 H01L21/00;H01L21/31;H01L21/469;H01L29/788 主分类号 H01L21/00
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