发明名称 |
PRODUCT-RELATED FEEDBACK FOR PROCESS CONTROL |
摘要 |
A method, apparatus, and a system for performing a product feedback for process control are provided. Metrology data relating to a first workpiece is received. An end of line parameter relating to the first workpiece is received. The end of line parameter is correlated with the metrology data. A process control associated with a plurality of processes to be performed on a second workpiece is adjusted based upon the correlating. |
申请公布号 |
WO2007046945(A2) |
申请公布日期 |
2007.04.26 |
申请号 |
WO2006US32921 |
申请日期 |
2006.08.23 |
申请人 |
ADVANCED MICRO DEVICES, INC.;RETERSDORF, MICHAEL, A. |
发明人 |
RETERSDORF, MICHAEL, A. |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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