发明名称 |
LIGHT-EMITTING DEVICE, METHOD FOR MANUFACTURING LIGHT-EMITTING DEVICE, AND SUBSTRATE PROCESSING APPARATUS |
摘要 |
<p>Disclosed is a substrate processing apparatus for forming a light-emitting device, wherein an organic layer containing a light-emitting layer is formed between a first electrode and a second electrode, on a substrate to be processed. This substrate processing apparatus is characterized by comprising an organic layer-forming device for forming the organic layer on the first electrode formed on the substrate to be processed, an electrode-forming device for forming the second electrode on the organic layer, and an etching device for etching the organic layer.</p> |
申请公布号 |
KR20080089482(A) |
申请公布日期 |
2008.10.06 |
申请号 |
KR20087019887 |
申请日期 |
2007.02.13 |
申请人 |
TOKYO ELECTRON LIMITED;NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY |
发明人 |
NOZAWA TOSHIHISA;MOYAMA KAZUKI;OHMI TADAHIRO;KAWAMURA CHUICHI;YOSHINO KIMIHIKO |
分类号 |
H05B33/10;H01L51/50 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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