| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection apparatus and a defect inspection method, which enable potential failures and signs of abnormality to be discovered in order to prevent any defect from occurring in its market, by referring to history information in the inspection process, even in the case of an object to be inspected whose apparent operation is normal or whose characteristic meets a specification. SOLUTION: The history information is not only utilized for analyzing defective goods in the market, but also referred in the inspection process, thereby enabling the potential failures and signs of abnormality to be discovered even in the case of a deck unit 2 apparently operating normally, and preventing any defective good from arriving on the market. COPYRIGHT: (C)2007,JPO&INPIT
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