| 摘要 |
PROBLEM TO BE SOLVED: To prevent generation of DUT (Device Under Test)destruction by output abnormality of a test signal generation part during a test. SOLUTION: This test signal generation circuit has: the test signal generation part 100; a shut-off switch S6 provided in a connection path between a semiconductor device DUT and the test signal generation part; and an abnormality detection part 2 monitoring output of the test signal generation part 100, controlling the shut-off switch S6 when a voltage value of the monitored output comes out of a normal range, and shutting off the connection path between the test signal generation part 100 and the semiconductor device DUT. COPYRIGHT: (C)2007,JPO&INPIT
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