| 摘要 |
PROBLEM TO BE SOLVED: To provide an interleaf peeling-off device capable of peeling off an interleaf for protecting a glass substrate easily and peeling it off efficiently by a simple structure. SOLUTION: This interleaf peeling-off device is provided with a pair of holding pieces 34a, 34b provided turnably, a supporting rod 38 for supporting the holding pieces 34a, 34b so as to advance and retract freely, and a driving device for letting the supporting rod 38 advance and retract. While the interleaf 14 on a surface of the substrate 12 is positioned on a circular arc on which tip parts of the holding pieces 34a, 34b turn, moving of the supporting rod 38 is stopped. By turning the holding pieces 34a, 34b, nipping and holding the interleaf 14 by the pair of holding pieces 34a, 34b, and letting the supporting member 38 evacuate, the interleaf 14 is peeled off from the glass substrate 12. COPYRIGHT: (C)2007,JPO&INPIT
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