| 摘要 |
The present invention provides a substrate for a VCSEL that improves reliability and yield. A substrate for VCSEL includes multiple element regions separated by an element dividing region that is scribed or diced. In each element region, a light emitter that emits laser light in a direction perpendicular to the substrate, and an electrode pad electrically coupled to the light emitter are formed. In the element dividing region, electrode pads for inspection each electrically coupled to the light emitter of each element region is formed.
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