发明名称 |
MEMS SENSOR DRIVING DEVICE, MEMS SENSOR DRIVING METHOD, AND ACTIVE SENSOR USING MEMS |
摘要 |
A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.
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申请公布号 |
US2007089512(A1) |
申请公布日期 |
2007.04.26 |
申请号 |
US20060539743 |
申请日期 |
2006.10.09 |
申请人 |
MATSUHISA KAZUHIRO;FUKUMOTO KOJI;NAGATA MASAYA;YASUI ATSUHITO |
发明人 |
MATSUHISA KAZUHIRO;FUKUMOTO KOJI;NAGATA MASAYA;YASUI ATSUHITO |
分类号 |
G01P15/00 |
主分类号 |
G01P15/00 |
代理机构 |
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主权项 |
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地址 |
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