摘要 |
<p>The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.</p> |
申请人 |
INTERMOLECULAR, INC.;BOUSSIE, THOMAS, R.;CHIANG, TONY, P.;LAZOVSKY, DAVID, E.;MCWAID, THOMAS, H. |
发明人 |
BOUSSIE, THOMAS, R.;CHIANG, TONY, P.;LAZOVSKY, DAVID, E.;MCWAID, THOMAS, H. |