| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composite film-covered member in a plasma treatment container excellent in plasma erosion resistance, and a method for manufacturing the same. <P>SOLUTION: The composite film-covered member in the plasma treatment container is covered with a composite film obtained by forming an undercoat made of a metal coating film on a surface of a substrate, then forming an intermediate layer made of Al<SB>2</SB>O<SB>3</SB>or a mixture of Al<SB>2</SB>O<SB>3</SB>and Y<SB>2</SB>O<SB>3</SB>on the undercoat, and subsequently forming a Y<SB>2</SB>O<SB>3</SB>sprayed coating as a topcoat. <P>COPYRIGHT: (C)2007,JPO&INPIT |
