| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect-removing device, etc. capable of quickly removing defect regions over a wide range, preventing deterioration in quality, related to defect removal, and of reducing the expense load related to defect removal. <P>SOLUTION: The defect removing device 1 controls an X-direction positioning mechanism 15, a Y-direction positioning mechanism 16 and a θ-direction positioning mechanism 18 so as to perform relative positioning between a substrate and a suction device 7. The defect removing device 1 moves a nozzle 9 of the suction device 7 to the positions of suction points 35 in the defect regions 33. The defect removing device 1 controls a Z-direction positioning mechanism 17 to bring the nozzle 9 into contact with or close to coloring agents 27 in the defect regions 33. The defect removing device 1 makes a vacuum generator 11 drive, to generate vacuum and sucks the coloring agents 27 in the defect regions 33 through the nozzle 9 before curing. <P>COPYRIGHT: (C)2007,JPO&INPIT |
