| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo vacuum pump having pump discharge characteristics capable of corresponding to a large quantity of gas discharge by rotating a rotary blade of a pump at high speed and enabling continuous operation under a thigh temperature condition, and capable of performing heat-up operation for preventing formation of reaction secondary product. SOLUTION: The turbo vacuum pump 101A is provided with a suction part 1a sucking gas in an axial direction, an exhaust part L including a rotary blade 5 and a fixed blade 8 discharging gas sucked by the suction part 1a, and a rotary shaft 4 rotating the rotary blade. The rotary blade includes a boss part 16 connected to the rotary shaft and cylindrical parts 17a, 17b projecting from the boss part 16 in an axial direction. The boss part and the cylindrical part are composed of metal matrix composite using porous ceramics and aluminum alloy. COPYRIGHT: (C)2007,JPO&INPIT
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