| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that the characteristic of a TFT element formed on a substrate is adversely affected when inspecting a sealing part by using a sealing material, to which a fluorescent substance reactive with UV rays is mixed, and irradiating the sealing part withe the UV rays. SOLUTION: The inspection device is equipped with a UV ray irradiating device 15 to irradiate a pair of substrates (11, 12) with UV rays, a UV camera to capture an image of the pair of substrates (11, 12) being irradiated with UV rays by the UV irradiating device 15, a timing section to measure the irradiation time to irradiate the pair of substrates (11, 12) with UV rays by the UV irradiating device 15, and a control device 19 to inspect the sealing state of a sealed part 13 by using the image, wherein the UV camera 16 captures the image of the pair of substrates (11, 12) irradiated with UV rays by the UV ray irradiating device 15 at the time when the time measured by the timing section reaches a value subtracting a predetermined time from the entire irradiating time for irradiating the pair of substrates (11, 12) with the UV rays. COPYRIGHT: (C)2007,JPO&INPIT
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