METHOD FOR MANUFACTURING ELECTROSTATIC ACTUATOR, ELECTROSTATIC ACTUATOR, METHOD FOR MANUFACTURING DROPLET DISCHARGE HEAD, DROPLET DISCHARGE HEAD, DROPLET DISCHARGE DEVICE, AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator with excellent driving stability and driving durability by eliminating action failures due to adhesion of a vibrating plate. SOLUTION: As shown in Figure 2, this method is to manufacture an electrostatic actuator provided with a vibrating plate 4 having flexibility and an independent electrode 8 opposed to the vibrating plate 4 via a gap 30, and driving the vibrating plate 4 by generating an electrostatic force between the vibrating plate 4 and the independent electrode 8. This method includes a hydrophobic treatment step for dispersing a hydrophobic agent inside the gap 30 and adhering or reacting the hydrophobic agent on the vibrating plate 4 and the opposed face of the opposed electrode 8, a moisture and hydrophobic agent removing step for thermally sucking the inside of the gap 30, and a sealing step for airtightly sealing the inside of the gap 30 in a dry gas. COPYRIGHT: (C)2007,JPO&INPIT