| 摘要 |
An apparatus for manufacturing carbon nanotubes is provided. The apparatus includes a reaction chamber having a first inlet configured for introducing a carbon-containing gas thereinto and a first outlet; a heater for elevating an interior temperature of the reaction chamber, wherein the reaction chamber is configured for accommodating a substrate and the first inlet defines a route for channeling the introduced carbon-containing gas toward the substrate, the route being substantially perpendicular to a main plane of the substrate.
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