| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To facilitate detection of an object to be measured in a short distance on the occasion of detecting the object to be measured by irradiation with an electromagnetic wave, and prevent lowering of detection sensitivity caused by interference objects being between the object to be measured and an object-to-be-measured detecting device. <P>SOLUTION: This object-to-be-measured detecting device 1 is provided with a light projecting unit 4 for diffusively radiating a pulse laser beam, a convex lens 9 for converting the laser beam radiated from the projecting unit 4 into parallel light, a light receiving unit 5 for receiving via the convex lens 9, a laser beam which is generated by the conversion with the convex lens 9, irradiates the object to be measured 14, and is reflected by the object 14, a PBS 6 which is interposed between the projecting unit 4 and the convex lens 9 and between the receiving unit 5 and the convex lens 9, guides the laser beam emitted from the projecting unit 4 to the convex lens 9, and moreover guides the laser beam reflected by the object 14 to the receiving unit 5 from the convex lens 9, and a distance detecting unit 13 which compares the laser beam emitted from the projecting unit 4 with the laser beam received by the receiving unit 5, and detects its distance up to the object 14. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
