| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize easy laser annealing operation and a simple constitution of a laser anneal device. <P>SOLUTION: Pure water is sprayed in a W-shaped liquid column from a spray nozzle provided to a processing head 6 to a work piece 2 formed by laminating an amorphous semiconductor film on a substrate 2a, and a laser light L is subjected to light guiding into the W-shaped liquid column. Since the inside of the liquid column W is irradiated with the guided laser light L, the amorphous silicon film 2b is crystallized into a polysilicon film, and in the process, pure water of the liquid column W spreads along the amorphous silicon film 2b, thus covering a portion irradiated with the laser light L with the pure water and preventing it from coming into contact with air. Furthermore, a portion heated by the laser light L is rapidly cooled by the pure water of the liquid column W, and the crystal grain of the crystallized polysilicon can be enlarged. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
