| 摘要 |
PROBLEM TO BE SOLVED: To always visually examine the surface flaw of a glass substrate to enhance not only the reliability of visual examination but also operability. SOLUTION: This visual examination device 1 is constituted so as to visually examine the flaw of a substrate G and equipped with a substrate holder 2 for holding the substrate, a first rotary mechanism 3 for rotating the substrate holder, a light irradiation means 4 for irradiating the surface of the substrate held on the substrate holder with light L for visual examination, a second rotary mechanism 5 for rotating the whole of or a part of the optical system of the light irradiation means and a control part 6 which respectively controls the operations of both rotary mechanisms and operates either one of the rotary mechanisms to operate the other one of them in connection with the operation of one of the rotary mechanisms to control the postures of the substrate holder and the light irradiation means so that light is turned to an inspect P with respect to the surface G1 of the substrate. COPYRIGHT: (C)2007,JPO&INPIT
|
