NON-CONTACT DISCRETE REMOVAL OF SUBSTRATE SURFACE CONTAMINANTS/COATINGS, AND METHOD, APPARATUS, AND SYSTEM FOR IMPLEMENTING THE SAME

摘要

A substrate preparation method is provided. The method includes providing a substrate to be prepared. The substrate has a first layer and second layer. The first layer is to be removed from over the second layer. An energy frequency that is to be absorbed by the second layer while penetrating through the first layer transparently is determined. Energy that has the determined energy frequency is applied onto the first layer so as to disrupt a bond between the first layer and the second layer at a location of application of the energy. A portion of the first layer defined at the location of application of energy is removed. A substrate preparation apparatus is also provided.