| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress ink degradation due to mixture of particles, addition of agents and the like by preventing lyophilic properties of a nozzle plate rear face at a base of a polymer material from degrading with time. <P>SOLUTION: A lyophilic film 5 higher in lyophilic properties than the base 2 is formed at least in a part of the nozzle plate rear face 1B joined to a head body 7 at the base 2 of a nozzle plate 1. A water-repellent film 4 is formed via an adhesion layer 3 to a nozzle plate front face 1A. After this, a nozzle hole 6 is bored in the nozzle plate 1. The adhesion layer 3 and the lyophilic film 5 are formed in a film thickness of 100 nm, preferably 30 nm by a sputtering method with SiO<SB>2</SB>as an inorganic oxide being made a material. <P>COPYRIGHT: (C)2007,JPO&INPIT |
