发明名称 ARTICLE LOADING/UNLOADING METHOD AND ARTICLE LOADING/UNLOADING DEVICE, EXPOSURE METHOD AND EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE
摘要 <p>A loading/unloading device capable of rapidly replacing the article on a loading table. A loading/unloading method comprises a first step (S11) of positioning the loading table on which an article to be unloaded is placed at a second position (P6) which is different from a first position (P5) in a predetermined plane (XY plane), a second step (S14) of unloading the article placed on the loading table positioned at the second position after the first step is performed, a third step (S16, S18) of positioning the loading table at the first position while a vertically moving member is positioned at a position lower than the lower surface of a loading member holding the next article to be loaded and waiting over the first position and higher than the loading surface of the loading table after the second step is performed, a fourth step (S17) of allowing the loading member holding the next article to be loaded onto the loading table to wait over the first position before the loading table is positioned at the first position, and a fifth step (S20) of loading the next article onto the loading table positioned at the first position after the third step is performed.</p>
申请公布号 WO2007046430(A1) 申请公布日期 2007.04.26
申请号 WO2006JP320763 申请日期 2006.10.18
申请人 NIKON CORPORATION;SUGIHARA, TARO 发明人 SUGIHARA, TARO
分类号 H01L21/677;H01L21/027 主分类号 H01L21/677
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